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Molecular pump is the use of high-speed rotation of the rotor to transfer momentum to the gas molecules, so that the directional speed, which is compressed, was driven to the exhaust port after a vacuum pump. This pump can be specifically divided into: (1) traction molecular pump gas molecules and high-speed rotor collision to obtain momentum, was driven to the pump outlet. (2) Turbomolecular pump by high-speed rotation of the rotor blades and stationary blades cooperate to achieve the extraction. Such pumps usually work in molecular flow conditions. (3) Composite molecular pump It is a composite molecular vacuum pump which is composed of turbo-type and traction-type molecular pumps in series.